Welcome to www.gs68.de

Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects.

For some of the topics covered on this site software utilities or demonstrations with (hopefully) some practical benefit are provided. They are mainly implemented in Python, simply due to the fact, that many bindings to scientific libraries and programs are available. Other used languages are Ruby and Perl . In this section you can find also, a bit of topic, the simple Perl application which is used to create this site.

Content:

• News ... not brand new, but interesting and informative.
• Data Analysis and Integration ... from Defect Analysis to FDC and back.
• Plasma Etching from simple physics to special applications.
• Publications of the webmaster related to semiconductor manufacturing.
• Tutorials some introductory material.
• Software ... some useful utilities and programs.
• Library to calculate online simple formulas which are relevant in semiconductor manufacturing.

Pdf is extensively used throughout this site, you might want to download

The site is privately owned and maintained. There is no relation to my employer RENESAS Semiconductor Europe (Landshut) GmbH.

Disclaimer:

The information and software on this site is distributed in the hope that it will be useful but without any warranty. The author(s) do not accept responsibility to anyone for the consequences of using it or for whether it serves any particular purpose or works at all. No warranty is made about the software or its performance.

Use and copying of this software and the preparation of derivative works based on this software are permitted, so long as the following conditions are met:

• No fees or compensation are charged for use, copies, or access to this software. You may charge a nominal distribution fee for the physical act of transferring a copy, but you may not charge for the program itself.
• If you modify this software, you must cause the modified file(s) to carry prominent notices describing the changes, who made the changes, and the date of those changes.

The information and software on this site is made available as is, and is distributed without warranty of any kind, either expressed or implied. In no event will the author(s) or their institutions be liable to you for damages, including lost profits, lost monies, or other special, incidental or consequential damages arising out of or in connection with the use or inability to use (including but not limited to loss of data or data being rendered inaccurate or losses sustained by third parties or a failure of the program to operate as documented) the program, even if you have been advised of the possibility of such damages, or for any claim by any other party, whether in an action of contract, negligence, or other tortuous action.

Copyright © 2001-2007 Gerhard Spitzlsperger